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Proceedings Paper

Physical and optical properties of sputtered lithium niobate thin films
Author(s): Dexin X. Lu; Emile M. W. Wong; Edwin Y. B. Pun; Po Sheun Chung
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Paper Abstract

LiNbO3 thin films were deposited by rf magnetron sputtering using LiNbO3 ceramic targets on z-cut single crystal LiTaO3 substrate. The as-deposited thin films were annealed at 550 degrees Celsius to 650 degrees Celsius for 60 min in oxygen ambient. The results of x-ray diffraction indicate that the dominant orientation of the sputtered LiNbO3 thin film is (202). The transmittance spectra of LiNbO3 thin films annealed at different temperatures were measured and compared with that of bulk single crystal substrate (the measured wavelength range is from 300 nm to 800 nm). The transmittance drops down to about 10% at 300 nm wavelength and has a value of 70 to approximately 80% at 800 nm wavelength.

Paper Details

Date Published: 3 October 1996
PDF: 8 pages
Proc. SPIE 2897, Electro-Optic and Second Harmonic Generation Materials, Devices, and Applications, (3 October 1996); doi: 10.1117/12.252926
Show Author Affiliations
Dexin X. Lu, City Univ. of Hong Kong (Hong Kong)
Emile M. W. Wong, City Univ. of Hong Kong (Hong Kong)
Edwin Y. B. Pun, City Univ. of Hong Kong (Hong Kong)
Po Sheun Chung, City Univ. of Hong Kong (Hong Kong)


Published in SPIE Proceedings Vol. 2897:
Electro-Optic and Second Harmonic Generation Materials, Devices, and Applications
Manfred Eich; Bruce H. T. Chai; Minhua Jiang, Editor(s)

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