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The in-situ long trace profiler window glass thermal deformation effect of measurement analysis
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Paper Abstract

Long trace profiler (LTP) is used to measure the large radius mirror surface profile. The in-situ LTP can be used to measure the X-ray mirror of an adaptive mirror bending system inside the vacuum chamber. In this study, the in-situ LTP measure head is outside of vacuum chamber. Therefore, the vacuum chamber and window glass thermal effect can introduce errors into the measurement results. This study calculated temperature distribution and deformation using the finite element method (FEM) software and calculate incident ray through the window glass. The incident ray through window glass with thermal gradient could increase optical path difference (OPD). The calculation resulted in an evaluation of in-situ LTP measurement error by thermal deformation.

Paper Details

Date Published: 11 September 2019
PDF: 8 pages
Proc. SPIE 11103, Optical Modeling and System Alignment, 111030D (11 September 2019); doi: 10.1117/12.2529051
Show Author Affiliations
Ming-Ying Hsu, National Synchrotron Radiation Research Ctr. (Taiwan)
Gung-Chian Yin, National Synchrotron Radiation Research Ctr. (Taiwan)
Chien-yu Lee, National Synchrotron Radiation Research Ctr. (Taiwan)
Bo-Yi Chen, National Synchrotron Radiation Research Ctr. (Taiwan)
Hok-Sum Fung, National Synchrotron Radiation Research Ctr. (Taiwan)
Shang-Wei Lin, National Synchrotron Radiation Research Ctr. (Taiwan)
Duan-Jen Wang, National Synchrotron Radiation Research Ctr. (Taiwan)
Yu-Shan Huang, National Synchrotron Radiation Research Ctr. (Taiwan)


Published in SPIE Proceedings Vol. 11103:
Optical Modeling and System Alignment
Mark A. Kahan; José Sasián; Richard N. Youngworth, Editor(s)

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