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High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy
Author(s): Rong Su; Matthew Thomas; Mingyu Liu; Jeremy Coupland; Richard Leach
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Paper Abstract

Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro- and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surface transfer function (3D STF) of a coherence scanning interferometer (CSI). Slope-dependent errors present in the original measurements are reduced after phase inversion of the 3D STF, and the final results agree with traceable contact stylus measurements within the 30 nm reproducibility of the stylus measurements. This method enables in-situ compensation for errors related to aberrations, defocus and diffraction.

Paper Details

Date Published: 3 September 2019
PDF: 7 pages
Proc. SPIE 11102, Applied Optical Metrology III, 1110205 (3 September 2019); doi: 10.1117/12.2528911
Show Author Affiliations
Rong Su, The Univ. of Nottingham (United Kingdom)
Matthew Thomas, The Univ. of Nottingham (United Kingdom)
Mingyu Liu, The Univ. of Nottingham (United Kingdom)
Jeremy Coupland, Loughborough Univ. (United Kingdom)
Richard Leach, The Univ. of Nottingham (United Kingdom)


Published in SPIE Proceedings Vol. 11102:
Applied Optical Metrology III
Erik Novak; James D. Trolinger, Editor(s)

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