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Phase measurement deviations in deflectometry due to properties of technical surfaces
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Paper Abstract

Phase Measuring Deflectometry (PMD) is a non-coherent full-field measurement technique based on geometrical optics, usually employed for specular surfaces. The measured phase in PMD corresponds to the position on the display recorded by the camera pixels. Concerning the measurement uncertainty in PMD systems, the camera can be regarded as the best described and most thoroughly modelled part, followed by the display with its nonlinearity or flatness deviation of the monitor surface shape. However, the effect of the properties of technical surfaces on the measurement deviation still lacks detailed investigation. As the errors in phase measurement will introduce subsequent errors into the slope and shape measurement, it is important to study these error sources. This paper investigates the effects of the properties of technical surfaces on phase measurements in a PMD system. We demonstrate the dependence of the deviations of phase measurements on surface roughness using well-defined samples manufactured by high precision diamond turning.

Paper Details

Date Published: 3 September 2019
PDF: 9 pages
Proc. SPIE 11102, Applied Optical Metrology III, 111020Q (3 September 2019); doi: 10.1117/12.2527894
Show Author Affiliations
Shekhar Kumar Patra, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Jonas Bartsch, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Michael Kalms, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Ralf B. Bergmann, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Univ. of Bremen (Germany)


Published in SPIE Proceedings Vol. 11102:
Applied Optical Metrology III
Erik Novak; James D. Trolinger, Editor(s)

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