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Wavelength-switchable Fizeau interferometry and its applications
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Paper Abstract

The wavefront of coated optics is one of critical performances. Due to the interference between the coating layers, the measurement results will be totally different if the measurement wavelength is different from the working wavelength. However, all of the commercial interferometers have single measurement wavelength, which can’t treat the optical coatings working at various wavelengths. A wavelength-switchable interferometer (WSI) capable of detecting wavefront information in a wide wavelength range of 488-1064 nm is proposed in this paper. The principle of design and performance of the system are given in detail. Some typical measurement applications, such as reflection plate and optical filters will also be presented.

Paper Details

Date Published: 21 June 2019
PDF: 6 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 1105627 (21 June 2019); doi: 10.1117/12.2526377
Show Author Affiliations
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Qi Lu, Shanghai Institute of Optics and Fine Mechanics (China)
You Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Xueke Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Zhouling Wu, ZC Optoelectronic Technologies, Ltd. (China)
Anhui Province Key Lab. of Non-Destructive Evaluation (China)
Jian Chen, ZC Optoelectronic Technologies, Ltd. (China)
Anhui Province Key Lab. of Non-Destructive Evaluation (China)
Ming Huang, ZC Optoelectronic Technologies, Ltd. (China)
Anhui Province Key Lab. of Non-Destructive Evaluation (China)


Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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