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Design and fabrication of opto-mechanical micro polymeric cantilever based optical fiber sensor
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Paper Abstract

In this paper, a micro-opto-mechanical polymeric cantilever based Fabry Perot Interferometer(CFPI) is reported as an optical fiber sensor. To be able to fabricate the sensor, a mold for the polymeric cantilever was fabricated using poly methyl methacrylate (PMMA) and with which a polydimethylsiloxane (PDMS) cantilever was constructed. After releasing the cantilever from the mold, cantilever and SMF were integrated together. As a result, a cavity was formed between SMF cleaved end and cantilever surface. When vibration is applied, the distance between the cantilever free end and cleaved end SMF changes, consequently the optical patch length of the sensor structure altered dynamically. Here, the effect of different frequencies and their amplitudes on the sensor spectrum is studied by using FFT and STFT analysis method.

Paper Details

Date Published: 21 June 2019
PDF: 5 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110562K (21 June 2019); doi: 10.1117/12.2526148
Show Author Affiliations
O. R. Ranjbar-Naeini, Shahid Beheshti Univ. (Iran, Islamic Republic of)
Mohammadreza Salehi Moghadam, Shahid Beheshti Univ. (Iran, Islamic Republic of)
A. Barandak, Shahid Beheshti Univ. (Iran, Islamic Republic of)
H. Latifi, Shahid Beheshti Univ. (Iran, Islamic Republic of)


Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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