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Direct monochromatic optic control system of the thickness of thin-film interference coatings applied in vacuum
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Paper Abstract

The principle of construction and design of the optical control system of the thickness of thin-film interference coatings applied in vacuum with the low-cost realization has been developed. The optical control system is built on the principle of measurement directly on the product - direct control at one wavelength (monochromatic). Model, allowing to evaluate technical capabilities of introduced system was made.

Paper Details

Date Published: 21 June 2019
PDF: 7 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110563Z (21 June 2019); doi: 10.1117/12.2525853
Show Author Affiliations
Y. O. Prosovskii, Bauman Moscow State Technical Univ. (Russian Federation)
D. G. Denisov, Bauman Moscow State Technical Univ. (Russian Federation)
O. F. Prosovskii, Technologiya (Russian Federation)
A. Y. Budnev, Technologiya (Russian Federation)


Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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