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Two-dimensional remote interferometric stage encoder through a single access port using range-resolved interferometry
Author(s): Kieran B. Wiseman; Thomas Kissinger; Ralph P. Tatam
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Paper Abstract

In this work, using our range-resolved interferometry (RRI) signal processing technique, we present a novel approach to multidimensional displacement measurements using only a single optical access port and very simple optical setup. By utilising surface reflections from a stage-mounted moving beamsplitter and two orthogonal stationary reference mirrors, two interferometers for the two Cartesian measurement directions are formed. With RRI, the interferometric phase signals of both interferometers can be independently demodulated, allowing simultaneous measurements of displacement in both dimensions using a single continuous-wave laser diode source and a single photodetector. In this paper, the capabilities of this approach are demonstrated using a proof-of-concept experiment with a multidimensional Piezoelectric stage performing a variety of stage movements. Measurements of displacements over a nominal stage working range of ±50μm are presented, demonstrating independent, simultaneous displacement measurements of two dimensions. The presented measurements show nanometer-level displacement resolutions with typical noise densities of 0.02 nm/√Hz over a 21 kHz bandwidth. It is thought that this approach could offer an interesting alternative to existing interferometric techniques for multi-dimensional metrology, benefiting from both simplicity and cost-effectiveness whilst maintaining the advantages that make optical techniques attractive to scientific and industrial applications.

Paper Details

Date Published: 21 June 2019
PDF: 7 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560C (21 June 2019); doi: 10.1117/12.2525596
Show Author Affiliations
Kieran B. Wiseman, Cranfield Univ. (United Kingdom)
Thomas Kissinger, Cranfield Univ. (United Kingdom)
Ralph P. Tatam, Cranfield Univ. (United Kingdom)


Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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