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New surface slope profiler with sub-millimeter spatial resolution
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Paper Abstract

In order to give a complete evaluation of the beamline’s performance, x-ray mirrors should be measured by advanced surface metrology technique. How to improve spatial resolution of the surface profilers with long trace is one of the important issues for metrology lab. In this paper, we present our newly developed surface slope profiler with focused beam to sample the surface under test. This system has capability to measure precision optics with both high accuracy and spatial resolution. The systematic error of the instrument is also improved for large aperture footprint in the focusing lens considering the lateral beam shift effect. The characterization experiments of the optical head and the scanning measurement of the sample have been carried out to verify the performance of the profiler with accuracy of sub-100 nrad.

Paper Details

Date Published: 9 September 2019
PDF: 6 pages
Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090O (9 September 2019); doi: 10.1117/12.2525488
Show Author Affiliations
Fugui Yang, Institute of High Energy Physics (China)
Ming Li, Institute of High Energy Physics (China)
Quan Cai, Institute of High Energy Physics (China)
Weifan Sheng, Institute of High Energy Physics (China)
Peng Liu, Institute of High Energy Physics (China)
Xiaowei Zhang, Institute of High Energy Physics (China)


Published in SPIE Proceedings Vol. 11109:
Advances in Metrology for X-Ray and EUV Optics VIII
Lahsen Assoufid; Haruhiko Ohashi; Anand Asundi, Editor(s)

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