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Influence mechanism of plasma cleaning and ion beam figuring on the intrinsic surface of fused silica
Author(s): Kun Zhang; Feng Shi; Lin Zhou; Wanli Zhang; Yifan Dai
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Paper Abstract

The laser damage threshold of fused silica optics is affected by the surface/subsurface defects in optical fabrication and is related to surface contamination. In this paper, the evolution of surface roughness and photothermal weak absorption of fused silica treated by plasma cleaning and ion beam figuring (IBF) is studied. The results show that plasma cleaning has a certain change on the surface roughness of fused silica, while the change of photothermal weak absorption depends on the initial surface quality. The surface roughness of fused silica has a certain regularity after ion beam figuring, and the photothermal weak absorption is basically consistent with the initial.

Paper Details

Date Published: 10 May 2019
PDF: 5 pages
Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 110681G (10 May 2019); doi: 10.1117/12.2524520
Show Author Affiliations
Kun Zhang, National Univ. of Defense Technology (China)
Hu'nan Key Lab. of Ultra-precision Machining Technology (China)
Feng Shi, National Univ. of Defense Technology (China)
Hu'nan Key Lab. of Ultra-precision Machining Technology (China)
Lin Zhou, National Univ. of Defense Technology (China)
Hu'nan Key Lab. of Ultra-precision Machining Technology (China)
Wanli Zhang, National Univ. of Defense Technology (China)
Hu'nan Key Lab. of Ultra-precision Machining Technology (China)
Yifan Dai, National Univ. of Defense Technology (China)
Hu'nan Key Lab. of Ultra-precision Machining Technology (China)


Published in SPIE Proceedings Vol. 11068:
Second Symposium on Novel Technology of X-Ray Imaging
Yangchao Tian; Tiqiao Xiao; Peng Liu, Editor(s)

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