Share Email Print
cover

Proceedings Paper • new

Polishing pad aging studies on computer controlled optical surfacing finishing for large-scale sapphire optical window
Author(s): Liang Lv; Heng Zhu; Xiang He
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Polishing pad becomes aging after finishing for a while, by reason of friction and wear, or polishing particles deposition, which will reduce polishing effects, increase polishing effects and make a low polishing quality. When the ultra-hardness of sapphire material needs high pressure and high rotate speed parameters, which will accelerate aging of polishing pad. When large scale sapphire optical window is finished by computer controlled optical surfacing (CCOS) method, the polishing pad aging problem is an important confinement factor for high quality of polishing. In this paper, we confirmed the stable polishing period and aging time node of pitch pad and polyurethane pad by polishing experiments. For pitch pad, time aging nodes are between 50min and 75min with polishing pressure 0.1Mpa and 0.2Mpa and between 25min and 50min with polishing pressure 0.4Mpa. For polyurethane pad, the time aging nodes are over 75min with polishing pressure 0.1Mpa and 0.2Mpa and between 50min and 75min with polishing pressure 0.4Mpa. The aging time of polyurethane pad is later than that of pitch pad. Increasing polishing pressure will help increase material removal rate, but will accelerate aging of polishing pad

Paper Details

Date Published: 10 May 2019
PDF: 7 pages
Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 1106819 (10 May 2019); doi: 10.1117/12.2524350
Show Author Affiliations
Liang Lv, Chengdu Fine Optical Engineering Research Ctr. (China)
Heng Zhu, Chengdu Fine Optical Engineering Research Ctr. (China)
Xiang He, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 11068:
Second Symposium on Novel Technology of X-Ray Imaging
Yangchao Tian; Tiqiao Xiao; Peng Liu, Editor(s)

© SPIE. Terms of Use
Back to Top