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PECVD silicon nitride optical waveguide devices for sensing applications in the visible and <1µm near infrared wavelength region
Author(s): Rainer Hainberger; Paul Muellner; Stefan Nevlacsil; Florian Vogelbacher; Moritz Eggeling; Alejandro Maese-Novo; Martin Sagmeister; Günther Koppitsch; Jochen Kraft; Xue Zhou; Jinhua Huang; Mingzhu Li; Ke-Jian Jiang; Yanlin Song
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Paper Abstract

We report several PECVD silicon nitride photonic building blocks required for the implementation of a CMOS-compatible photonic integrated circuit technology platform operating in the 850 nm and 600 nm wavelength domain. In particular, for the 850 nm wavelength region we discuss a low-loss broadband 1x2 power splitter and a loop mirror. In the 600 nm wavelength region, we present new results on an optically pumped integrated dye-doped polymer laser that couples its light directly into a silicon nitride waveguide. Moreover, we discuss design considerations for a waveguide based gas sensing concept detecting target gas specific absorption changes in a thin dye-doped polymer cladding layer.

Paper Details

Date Published: 26 April 2019
PDF: 8 pages
Proc. SPIE 11031, Integrated Optics: Design, Devices, Systems, and Applications V, 110310A (26 April 2019); doi: 10.1117/12.2524277
Show Author Affiliations
Rainer Hainberger, AIT Austrian Institute of Technology GmbH (Austria)
Paul Muellner, AIT Austrian Institute of Technology GmbH (Austria)
Stefan Nevlacsil, AIT Austrian Institute of Technology GmbH (Austria)
Florian Vogelbacher, AIT Austrian Institute of Technology GmbH (Austria)
Moritz Eggeling, AIT Austrian Institute of Technology GmbH (Austria)
Alejandro Maese-Novo, AIT Austrian Institute of Technology GmbH (Austria)
Martin Sagmeister, ams AG (Austria)
Günther Koppitsch, ams AG (Austria)
Jochen Kraft, ams AG (Austria)
Xue Zhou, Institute of Chemistry (China)
Jinhua Huang, Institute of Chemistry (China)
Mingzhu Li, Institute of Chemistry (China)
Ke-Jian Jiang, Institute of Chemistry (China)
Yanlin Song, Institute of Chemistry (China)


Published in SPIE Proceedings Vol. 11031:
Integrated Optics: Design, Devices, Systems, and Applications V
Pavel Cheben; Jiří Čtyroký; Iñigo Molina-Fernández, Editor(s)

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