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Finite-element predictive 3D modelling and optimization of membrane-based thermoresistive MEMS accelerometers
Author(s): N. A. Djuzhev; R. V. Lapshin; A. M. Belin; A. I. Ovodov; D. V. Novikov; G. D. Demin
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Paper Abstract

A three-dimensional numerical model of a thermal accelerometer with a thermal resistance effect in a sensitive element on a thin-film multilayer membrane based on MEMS technology has been developed and tested. The change in temperature difference on thermistors in the acceleration range from 1 to 10g and the applicability of the proposed technological solution for the implementation of thermal inertial systems are analyzed. The results obtained can be used for the optimization and development of a multi-axis thermal accelerometer.

Paper Details

Date Published: 15 March 2019
PDF: 10 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220R (15 March 2019); doi: 10.1117/12.2522515
Show Author Affiliations
N. A. Djuzhev, National Research Univ. of Electronic Technology (Russian Federation)
R. V. Lapshin, National Research Univ. of Electronic Technology (Russian Federation)
A. M. Belin, National Research Univ. of Electronic Technology (Russian Federation)
A. I. Ovodov, National Research Univ. of Electronic Technology (Russian Federation)
D. V. Novikov, National Research Univ. of Electronic Technology (Russian Federation)
G. D. Demin, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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