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Influence of annealing on nanocrystalline LiNbO3 films properties
Author(s): Viktor S. Klimin; Zakhar E. Vakulov; Roman V. Tominov; Yuriy N. Varzarev; Iosif E. Clemente; Andrew V. Miakonkikh; Konstantin V. Rudenko; Oleg A. Ageev
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Paper Abstract

This work shows the results of studies on the effect of annealing on the properties of nanocrystalline LiNbO3 films. Unannealed LiNbO3 films are characterized by the formation of triangular grains and large droplets on the film surface. It has been shown that annealing in an oxygen atmosphere leads to significantly reducing the surface roughness of the films (from 63 to 47 nm) and the density of droplets on the LiNbO3 film surface. It was established that annealing within 1 hour in oxygen atmosphere under temperature of 600°C allows increasing oxygen content in the film from 4.03 atm. % up to 11.02 atm. %. Using annealing made it possible to reduce the maximum value of absorption rate from 1.11 to 0.29. Obtained results can be used under development of energy converters and acousto-optic devices for use in electronics and medicine.

Paper Details

Date Published: 15 March 2019
PDF: 7 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221E (15 March 2019); doi: 10.1117/12.2522316
Show Author Affiliations
Viktor S. Klimin, Southern Federal Univ. (Russian Federation)
Zakhar E. Vakulov, Southern Federal Univ. (Russian Federation)
Roman V. Tominov, Southern Federal Univ. (Russian Federation)
Yuriy N. Varzarev, Southern Federal Univ. (Russian Federation)
Iosif E. Clemente, Institute of Physics and Technology of the RAS (Russian Federation)
Andrew V. Miakonkikh, Institute of Physics and Technology of the RAS (Russian Federation)
Konstantin V. Rudenko, Institute of Physics and Technology of the RAS (Russian Federation)
Oleg A. Ageev, Southern Federal Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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