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Aging of Al thin film extreme ultraviolet filters
Author(s): Karel Kolacek; Alexandr Frolov; Jiri Schmidt; Jaroslav Straus; Petr Hoffer; Vitaliy Stelmashuk; Petr Lukes; Libor Juha
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Paper Abstract

Thin film Al filters, very popular for their high transmittance in the wavelength range 17 to 67 nm and simultaneously low transmittance in the visible and near UV region, are prone to oxidation. The amorphous Al2O3 layers on the Al surfaces have much smaller transmittance than the bulk Al material, and, therefore, they strongly influence the total transmittance of the filter. This paper gives not only the transmittance of very old Al filters, but also maps the transmittance development of Al filters in two years span since their delivery in not controlled atmosphere. Surprisingly, it turned out that while the transmission of surface layers (present on filters since the very beginning) slightly increases with time, the average attenuation rate per unit filter thickness of the bulk material (Al) with time dramatically rises.

Paper Details

Date Published: 24 April 2019
PDF: 6 pages
Proc. SPIE 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII, 110350O (24 April 2019); doi: 10.1117/12.2521988
Show Author Affiliations
Karel Kolacek, Institute of Plasma Physics of the CAS, v.v.i. (Czech Republic)
Alexandr Frolov, Institute of Plasma Physics of the CAS, v.v.i. (Czech Republic)
Jiri Schmidt, Institute of Plasma Physics of the CAS, v.v.i. (Czech Republic)
Jaroslav Straus, Institute of Plasma Physics of the CAS, v.v.i. (Czech Republic)
Petr Hoffer, Institute of Plasma Physics of the CAS, v.v.i. (Czech Republic)
Vitaliy Stelmashuk, Institute of Plasma Physics of the CAS, v.v.i. (Czech Republic)
Petr Lukes, Institute of Plasma Physics of the CAS, v.v.i. (Czech Republic)
Libor Juha, Institute of Physics of the CAS, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 11035:
Optics Damage and Materials Processing by EUV/X-ray Radiation VII
Libor Juha; Saša Bajt; Stéphane Guizard, Editor(s)

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