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Laser reduction of graphene oxide thin films for nanoelectronic application
Author(s): I. A. Komarov; N. S. Struchkov; D. D. Levin; G. O. Silakov; E. E. Danelyan; M. A. Orlov; S. N. Sсherbin; V. V. Bogachev; N. K. Lagodenko
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Paper Abstract

In this article a new approach to graphene oxide spray deposition is demonstrated. Developed spray methodic allows to fabricate uniform low thickness graphene oxide coatings on a wide range of substrates without surface hydrophilization. A comparison of films obtained by spray a spin coating methods is given. The perspectives of industrial application of developed method for production of graphene oxide bio- and gas sensors are considered. Results of graphene oxide films local reduction performed by 1030 nm continuous CO2 laser engraver and 445 nm solid-state laser are presented. Features and difficulties of thin graphene oxide films reduction are discussed.

Paper Details

Date Published: 15 March 2019
PDF: 9 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221A (15 March 2019); doi: 10.1117/12.2521802
Show Author Affiliations
I. A. Komarov, Bauman Moscow State Technical Univ. (Russian Federation)
N. S. Struchkov, National Research Univ. of Electronic Technology (Russian Federation)
D. D. Levin, National Research Univ. of Electronic Technology (Russian Federation)
G. O. Silakov, National Research Univ. of Electronic Technology (Russian Federation)
E. E. Danelyan, Bauman Moscow State Technical Univ. (Russian Federation)
M. A. Orlov, Bauman Moscow State Technical Univ. (Russian Federation)
S. N. Sсherbin, Bauman Moscow State Technical Univ. (Russian Federation)
V. V. Bogachev, Bauman Moscow State Technical Univ. (Russian Federation)
N. K. Lagodenko, Bauman Moscow State Technical Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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