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ANSYS simulation of the microaccelerometer sensor
Author(s): S. Timoshenkov; V. Kalugin; S. Anchutin; E. Kochurina
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Paper Abstract

The use of the ANSYS software for modeling the design of the sensitive element of the microaccelerometer is considered. The article presents the results of modal and static analysis. The features of the manufacturing technology of the sensitive element of the micromechanical accelerometer are given.

Paper Details

Date Published: 15 March 2019
PDF: 8 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220S (15 March 2019); doi: 10.1117/12.2521783
Show Author Affiliations
S. Timoshenkov, National Research Univ. of Electronic Technology (Russian Federation)
V. Kalugin, National Research Univ. of Electronic Technology (Russian Federation)
S. Anchutin, National Research Univ. of Electronic Technology (Russian Federation)
E. Kochurina, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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