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Research of the microelectromechanical switch with different materials of metal membrane
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Paper Abstract

This paper is devoted to the selection of the optimal material for the structural layer of microelectromechanical switches in order to reduce or completely eliminate the stiction of the moving parts of the structure to the fixed, as well as to minimize the values of the control voltages and switching speed without compromising reliability using the Ashby approach. The choice of the most suitable structural layer material is represented by performance indices for a number of key parameters of microelectromechanical switches. It is established that aluminum-based alloys and metals are the most preferable than other available materials for the structural layer of microelectromechanical switches.

Paper Details

Date Published: 15 March 2019
PDF: 12 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220Q (15 March 2019); doi: 10.1117/12.2521420
Show Author Affiliations
Igor E. Lysenko, Southern Federal Univ. (Russian Federation)
Alexey V. Tkachenko, Southern Federal Univ. (Russian Federation)
Olga A. Ezhova, Southern Federal Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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