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Proceedings Paper

High-sensitivity photoelectric pressure sensor based on a monolithic dual photodiode
Author(s): Weimin Zheng; Tianning Cao; Junxia Qian
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Paper Abstract

This paper presents a novel and simple photoelectric pressure sensor. The pressure sensing element is a linear capsule with a miniature opaque windowshade on its center. The photo detector is a monolithic dual photodiode. The two photodiodes of this detector are used as reference photodiode and the detection photodiode, respectively. Through this differential structure, the displacement of the windowshade caused by the fluid pressure is picked up, while the influence of the environmental perturbation can be eliminated. The nonlinearity error can be corrected by a single chip computer. This sensor has excellent stability, linearity and high sensitivity as well as good manufacturability. Experiment results show that the minimum detectable pressure is less than 20 Pa with the measurement range of 0 approximately 6 HZ, the nonlinearity error without correction is less than +/- 0.3% within the range of 6000 Pa.

Paper Details

Date Published: 25 September 1996
PDF: 8 pages
Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); doi: 10.1117/12.252106
Show Author Affiliations
Weimin Zheng, Zhejiang Univ. (China)
Tianning Cao, Zhejiang Univ. (China)
Junxia Qian, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 2894:
Detectors, Focal Plane Arrays, and Applications
William G. D. Frederick; Junhong Su; Marc Wigdor, Editor(s)

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