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Proceedings Paper

New type of multijunction thermopile IR detector
Author(s): Tietun Sun; Li Hui Guo
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Paper Abstract

A newly designed thin-film thermopile infrared detector, which as an absorption layer and a sensitive area on two sides are fabricated using integrated-circuit technology. The device uses a series-connected thermocouples array whose `hot' junction are supported on a thin Myler film of 1 - 3 micrometers thickness. By a special method of fasting the shadow mask, the thermopile with 48 Bi-Sb couples for 2 X 2 mm2 area produces a responsivity of 50 - 70 V/W and relaxation time of about 70 ms.

Paper Details

Date Published: 25 September 1996
PDF: 4 pages
Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); doi: 10.1117/12.252105
Show Author Affiliations
Tietun Sun, Shanghai Jiao Tong Univ. (China)
Li Hui Guo, Shanghai Jiao Tong Univ. (China)

Published in SPIE Proceedings Vol. 2894:
Detectors, Focal Plane Arrays, and Applications
William G. D. Frederick; Junhong Su; Marc Wigdor, Editor(s)

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