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Enhanced performance of integrated silicon nanophotonic devices engineered by sub-wavelength grating structures
Author(s): Daniel Benedikovic; Mathias Berciano; Carlos Alberto Alonso-Ramos; Xavier Le Roux; Sylvain Guerber; Guillaume Marcaud; Vladyslav Vakarin; Diego Pérez-Galacho; Eric Cassan; Delphine Marris-Morini; Pavel Cheben; Frédéric Boeuf; Charles Baudot; Laurent Vivien
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Paper Abstract

Sub-wavelength gratings, segmented resonant-less structures with geometries featuring scales considerably smaller than the wavelength of light, have enabled an attractive technological concept to locally control light guiding properties in planar silicon chip architectures. This concept has allowed for additional degrees of freedom to tailor effective mode index, modal confinement, waveguide dispersion, as well as anisotropy, thereby providing a vital route towards high performing devices with engineered optical properties. Sub-wavelength integrated nanophotonics has opened up new horizons for realization of key building components that afford outstanding device performances, typically beyond those achieved by conventional design strategies, yet favorably benefiting from the sub-100-nm pattern resolution of established semiconductor manufacturing tools in nanophotonic foundries. The distinctive features of sub-wavelength grating structures are considered essential for future generation of chip-scale applications in optical communications and interconnects, biomedicine, as well as quantum-based technologies. In this work, we report recent advances in the development of high-performance on-chip nanophotonic waveguides and devices engineered with the sub-wavelength grating metamaterial structures. In particular, we discuss recent achievements of low-loss waveguides with controlled chromatic dispersion, high-efficiency fiber-to-chip surface grating couplers, micro-ring resonators, and grating-assisted waveguide filters, implemented on the mature silicon-on-insulator technology.

Paper Details

Date Published: 26 April 2019
PDF: 10 pages
Proc. SPIE 11031, Integrated Optics: Design, Devices, Systems, and Applications V, 1103104 (26 April 2019); doi: 10.1117/12.2520780
Show Author Affiliations
Daniel Benedikovic, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Mathias Berciano, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Carlos Alberto Alonso-Ramos, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Xavier Le Roux, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Sylvain Guerber, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
STMicroelectronics SAS (France)
Guillaume Marcaud, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Vladyslav Vakarin, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Diego Pérez-Galacho, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Eric Cassan, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Delphine Marris-Morini, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)
Pavel Cheben, National Research Council Canada (Canada)
Frédéric Boeuf, STMicroelectronics SAS (France)
Charles Baudot, STMicroelectronics SAS (France)
Laurent Vivien, Ctr. de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris Saclay (France)


Published in SPIE Proceedings Vol. 11031:
Integrated Optics: Design, Devices, Systems, and Applications V
Pavel Cheben; Jiří Čtyroký; Iñigo Molina-Fernández, Editor(s)

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