Share Email Print
cover

Proceedings Paper • new

High-precision high-speed and noninvasive optic distance measurement
Author(s): Daowei Pan; Junxiang Wang; Ning Tang; Guohua Shi
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In all kinds of optical applications, the precision of central optical distance has significant influence on the desired imaging properties according to the optical design requirements. In this paper, we present a measurement method for the determination of the central distance both in assembled systems and single-lens with high precision, high speed and non-invasive characters. The distance between optical surfaces are optically measured by the mean of swept source domain interferometric system. A fiber-optics system with a central wavelength 1310 nm is built, the central distances of all surfaces within coherence length can be quickly measured at the same time. The system pixel resolution is about 0.1μm calibrated by Mitutoyo standard level-zero gauge and calculated by Fast Fourier Transform (FFT) and zero-padding algorithm. System precision double checked by other gauges is less than 0.3μm. The standard gauge-sets and a lens were measured by this system, the result also verified the high precision. The systematic error is less than 0.3μm and the sensitivity is about 22μm experimentally. The high speed swept light source (100kHz used in system) ensures the quick measuring speed. This measurement method has high precision, high speed, non-invasive and high sensitivity characters, and can be applied in related optical system.

Paper Details

Date Published: 12 March 2019
PDF: 7 pages
Proc. SPIE 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 1102343 (12 March 2019); doi: 10.1117/12.2520556
Show Author Affiliations
Daowei Pan, Shanghai Univ. (China)
Suzhou Institute of Biomedical Engineering and Technology (China)
Junxiang Wang, Suzhou Institute of Biomedical Engineering and Technology (China)
Univ. of Electronic Science and Technology of China (China)
Ning Tang, Suzhou Institute of Biomedical Engineering and Technology (China)
Univ. of Electronic Science and Technology of China (China)
Guohua Shi, Suzhou Institute of Biomedical Engineering and Technology (China)


Published in SPIE Proceedings Vol. 11023:
Fifth Symposium on Novel Optoelectronic Detection Technology and Application
Qifeng Yu; Wei Huang; You He, Editor(s)

© SPIE. Terms of Use
Back to Top