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Design considerations of the FBAR on-board test
Author(s): Xia-xi Xu; Yang Gao; Ting-ting Liu
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Paper Abstract

With the increased performance requirements for film bulk acoustic resonator (FBAR) devices, accurate test of FBAR device parameters has become critical. The key of the FBAR on-board test is its test fixture structure and de-embedding methods. In this paper, the research status of FBAR board testing technology is reviewed. The parasitic effects, impedance matching and clamping design of the test fixture structure design process are discussed. The principle and error model of de-embedding and the advantages/disadvantages of each calibration method are analyzed. The accuracy of FBAR on-board test can be improved by reducing parasitic effects, optimizing impedance matching, improving calibration methods, and optimizing error model.

Paper Details

Date Published: 12 March 2019
PDF: 8 pages
Proc. SPIE 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 110234W (12 March 2019); doi: 10.1117/12.2520350
Show Author Affiliations
Xia-xi Xu, Southwest Univ. of Science and Technology (China)
Yang Gao, Institute of Electronic Engineering (China)
Ting-ting Liu, Southwest Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 11023:
Fifth Symposium on Novel Optoelectronic Detection Technology and Application
Qifeng Yu; Wei Huang; You He, Editor(s)

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