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Proceedings Paper

Preparation and properties of amorphous SmTbFeCo thin films
Author(s): Z. Q. Lu; Zuoyi Li; Yuankai Zheng; Zuoqi Hu; Rui Xiong; Ke Wang; Gengqi Lin; Y. S. Hu
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Paper Abstract

SmTbFeCO amorphous films were r.f.-magnetron sputtered from a mosaic target onto glass substrate. The magnetic and magneto-optical properties of SmTbFeCo thin films deposited at different argon pressure, sputtering power and negative substrate bias voltage were studied. It is shown that the deposition conditions strongly affect the reflectivity R, the coercivity Hc and Kerr rotation angle (theta) k. In order to meet the requirement of magneto-optical recording, it is optimal to choose Ar pressure of 0.47 approximately 0.73 Pa, sputtering power of 300 approximately 350W, and negative substrate bias voltage of -80V approximately -110V.

Paper Details

Date Published: 20 September 1996
PDF: 6 pages
Proc. SPIE 2890, Optical Recording, Storage, and Retrieval Systems, (20 September 1996); doi: 10.1117/12.251974
Show Author Affiliations
Z. Q. Lu, Huazhong Univ. of Science and Technology (China)
Zuoyi Li, Huazhong Univ. of Science and Technology (China)
Yuankai Zheng, Huazhong Univ. of Science and Technology (China)
Zuoqi Hu, Huazhong Univ. of Science and Technology (China)
Rui Xiong, Huazhong Univ. of Science and Technology (China)
Ke Wang, Huazhong Univ. of Science and Technology (China)
Gengqi Lin, Huazhong Univ. of Science and Technology (China)
Y. S. Hu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2890:
Optical Recording, Storage, and Retrieval Systems
Baogen Feng; Yoshito Tsunoda, Editor(s)

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