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Proceedings Paper

Linearized and compensated interferometric system for high-velocity traceable length calibration on a metre scale
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Paper Abstract

We report on a traceable calibration system for a 3500mm-long console that carries a measurement system for inspecting the diameter of a circular reactor chassis. The system uses two single-pass laser interferometers with homodyne fringe detection for measurement in two degrees of freedom. The hybrid FPGA-microcontroller control module carries out the fringe detection together with the application-specific scale linearization approach and the compensation of environmental influences such as thermal elongation and the refractive index of air fluctuations. We demonstrated the system feasibility with an accuracy of a few microns and translation velocity higher than 0:1 metre per second.

Paper Details

Date Published: 18 December 2018
PDF: 7 pages
Proc. SPIE 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1097608 (18 December 2018); doi: 10.1117/12.2519461
Show Author Affiliations
Simon Rerucha, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Bretislav Mikel, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Zdenek Matej, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Ondrej Herman, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Miroslava Hola, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Michal Jelinek, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Petr Jedlicka, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Ondrej Cip, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)
Josef Lazar, Institute of Scientific Instruments of the CAS, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 10976:
21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Pavel Zemánek, Editor(s)

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