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Proceedings Paper

Design and preparation of polymer-based microspectrometer using laser lithography
Author(s): D. Jandura; M. Markotan; D. Pudis
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Paper Abstract

In this paper, we present design and preparation of polymer components for microspectrometer fabrication on a chip. The graphical program was used to design novel components in 3D arrangement. In experimental we used two-photon polymerization for direct laser writing of designed structures in IP-Dip photoresist material. Shape and morphological properties of prepared devices were investigated by scanning electron microscope (SEM). Finally, optical properties were examined by diffraction measurements.

Paper Details

Date Published: 18 December 2018
PDF: 4 pages
Proc. SPIE 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 109760U (18 December 2018); doi: 10.1117/12.2518354
Show Author Affiliations
D. Jandura, Univ. of Žilina (Slovakia)
M. Markotan, Univ. of Žilina (Slovakia)
D. Pudis, Univ. of Žilina (Slovakia)


Published in SPIE Proceedings Vol. 10976:
21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Pavel Zemánek, Editor(s)

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