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A helium mass spectrometry pressed integral leak detection technique for ultra-high vacuum devices
Author(s): Min Li; Xiao-jun Yang; Ying-Ping He; Tai-Min Zhang; Feng Liu; Zhuang Miao; Bei-Bei Liu; Yao-Jin Cheng
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Paper Abstract

Based on multi-weld seam of image intensifier tube, we have designed the leak detection platform for high vacuum electron devices, the experimental result show that Helium injection method’s minimum leakage rate is 10-11Pa·m3/s, and pressed integration method’s minimum leakage rate less than 10-11Pa·m3/s, and it is of positive significance to improve the life of the device.

Paper Details

Date Published: 12 March 2019
PDF: 7 pages
Proc. SPIE 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 110230C (12 March 2019); doi: 10.1117/12.2518280
Show Author Affiliations
Min Li, Science and Technology on Low-Light-Level Night Vision Lab. (China)
Kunming Institute of Physics (China)
Xiao-jun Yang, Science and Technology on Low-Light-Level Night Vision Lab. (China)
Kunming Institute of Physics (China)
Ying-Ping He, Science and Technology on Low-Light-Level Night Vision Lab. (China)
Kunming Institute of Physics (China)
Tai-Min Zhang, Science and Technology on Low-Light-Level Night Vision Lab. (China)
Kunming Institute of Physics (China)
Feng Liu, Science and Technology on Low-Light-Level Night Vision Lab. (China)
Kunming Institute of Physics (China)
Zhuang Miao, Science and Technology on Low-Light-Level Night Vision Lab. (China)
Kunming Institute of Physics (China)
Bei-Bei Liu, Science and Technology on Low-Light-Level Night Vision Lab. (China)
Kunming Institute of Physics (China)
Yao-Jin Cheng, Science and Technology on Low-Light-Level Night Vision Lab. (China)
Kunming Institute of Physics (China)


Published in SPIE Proceedings Vol. 11023:
Fifth Symposium on Novel Optoelectronic Detection Technology and Application
Qifeng Yu; Wei Huang; You He, Editor(s)

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