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Ellipsometric study of thin carbon films deposited by pulsed laser deposition
Author(s): A. Dikovska; L. Tzonev; I. Avramova; P. Terziiska; I. Bineva; G. Avdeev; E. Valcheva; J. Mladenoff; O. Angelov; S. Kolev; T. Milenov
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Paper Abstract

The fabrication of nano-crystalline carbon films was implemented by the application of pulsed laser deposition (PLD) technology. The experiments were performed in a standard on-axis laser ablation (LA) configuration. The third harmonic of a Nd:YAG laser was used for ablation of a microcrystalline graphite target. All experiments were performed in vacuum at a pressure of 1×10-3 Pa for different deposition times. (001) Oriented silicon (Si) covered by either 350 or 450 nm silica (SiO2) layer was used as a substrate. The films have a thickness between 4 and 40 nm and are characterized by X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, atomic force microscopy (AFM) and ellipsometry measurements. We established deposition of nano-sized graphene-like films on top of predominantly amorphous carbon films with a thickness of 1- 2 nm. The measured the (n and k) and determined the values for the forbidden gap of the films which are between 0.01 eV and about 1 eV with reference to the sp3 hybridized carbon content of the film.

Paper Details

Date Published: 29 January 2019
PDF: 6 pages
Proc. SPIE 11047, 20th International Conference and School on Quantum Electronics: Laser Physics and Applications, 110470N (29 January 2019); doi: 10.1117/12.2516970
Show Author Affiliations
A. Dikovska, "E. Djakov" Institute of Electronics (Bulgaria)
L. Tzonev, "E. Djakov" Institute of Electronics (Bulgaria)
I. Avramova, Institute of General and Inorganic Chemistry (Bulgaria)
P. Terziiska, Institute of Solid State Physics (Bulgaria)
I. Bineva, Institute of Solid State Physics (Bulgaria)
G. Avdeev, "R. Kaishev" Institute of Physical Chemistry (Bulgaria)
E. Valcheva, Sofia Univ. (Bulgaria)
J. Mladenoff, "E. Djakov" Institute of Electronics (Bulgaria)
O. Angelov, Central Lab. of Solar Energy and New Energy Sources (Bulgaria)
S. Kolev, "E. Djakov" Institute of Electronics (Bulgaria)
T. Milenov, "E. Djakov" Institute of Electronics (Bulgaria)


Published in SPIE Proceedings Vol. 11047:
20th International Conference and School on Quantum Electronics: Laser Physics and Applications
Tanja N. Dreischuh; Latchezar A. Avramov, Editor(s)

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