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Si photonics using micron-size waveguides
Author(s): Timo Aalto; Matteo Cherchi; Mikko Harjanne; Fei Sun; Tapani Vehmas; Srivathsa Bhat; Markku Kapulainen; Ari Hokkanen; Lauri Lehtimäki; Heikki Holmberg; Atte Haapalinna
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Paper Abstract

This paper explains and demonstrates the unique properties of micron-size silicon-on-insulator (SOI) waveguides. It gives an overview of the silicon photonics research at VTT, as well as latest R&D highlights. The benefits of high mode confinement in rib and strip waveguides are described, reaching from low losses and small footprint to polarization independent operation and ultra-wide wavelength range from 1.2 to over 4 μm. Most of the results are from photonic integrated circuits (PICs) on 3 μm SOI, while a 25 Gbps link with a transceiver on 12 μm SOI is also reported. Wavelength multiplexing and filtering is demonstrated with some breakthrough performance in both echelle gratings and arrayed waveguide gratings. Lowest losses are below 1 dB and lowest cross-talk is below -35 dB. Progress towards monolithically integrated, broadband isolators is described, involving polarization splitters, reciprocal polarization rotators and nonreciprocal Faraday rotation in 3 μm SOI waveguide spirals. Quick update is presented about switches, modulators and Ge photodiodes up to 15 GHz bandwidth. Hybrid integration of lasers, modulators and photodiodes is also reported. The added value of trimmed SOI wafers and cavity-SOI wafers in Si photonics processing is addressed. Latest results also include up-reflecting mirrors with <0.5 dB loss, which support wafer-level testing and packaging.

Paper Details

Date Published: 27 February 2019
PDF: 11 pages
Proc. SPIE 10914, Optical Components and Materials XVI, 109140B (27 February 2019); doi: 10.1117/12.2516289
Show Author Affiliations
Timo Aalto, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Matteo Cherchi, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Mikko Harjanne, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Fei Sun, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Tapani Vehmas, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Srivathsa Bhat, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Markku Kapulainen, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Ari Hokkanen, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Lauri Lehtimäki, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Heikki Holmberg, Okmetic Ltd. (Finland)
Atte Haapalinna, Okmetic Ltd. (Finland)


Published in SPIE Proceedings Vol. 10914:
Optical Components and Materials XVI
Shibin Jiang; Michel J. F. Digonnet, Editor(s)

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