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Modeling of dynamic image performance for lithographic projection lens
Author(s): Zhiyong Yang; Yating Shi; Hao Jiang; Shiyuan Liu
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Paper Abstract

As critical dimension shrinks, the image quality of lithographic projection lens is improved gradually. In lithographic tool, vibration is an important factor affecting the image quality of projection lens. The internal vibration of projection lens will change the relative position between the lens elements, reduce the image contrast and process window. There are usually two methods to suppress the internal vibration of lithographic projection lens, isolating the external vibration source and improving the stiffness of the internal structure. Based on the above methods, this paper proposes a dynamic imaging model (DIM) that establishes a precise quantitative relationship between the internal vibration of projection lens and the imaging contrast. The DIM has been used in image performance analysis and the structure design for lithographic projection lens.

Paper Details

Date Published: 20 March 2019
PDF: 7 pages
Proc. SPIE 10961, Optical Microlithography XXXII, 109610V (20 March 2019); doi: 10.1117/12.2515342
Show Author Affiliations
Zhiyong Yang, Huazhong Univ. of Science and Technology (China)
Yating Shi, Huazhong Univ. of Science and Technology (China)
Hao Jiang, Huazhong Univ. of Science and Technology (China)
Shiyuan Liu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10961:
Optical Microlithography XXXII
Jongwook Kye; Soichi Owa, Editor(s)

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