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EUV pellicle qualification on transmission and reflectance
Author(s): Rainer Lebert; Christian Pampfer; Andreas Biermanns-Foeth; Thomas Missalla; Christoph Phiesel; Christian Piel
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Paper Abstract

RI Research Instrument’s EUV pellicle transmission qualification tool EUV-PTT uses “effective inband EUV measurement” which is spectrally filtering emission of the EUV-Lamp to 2% bandwidth at 13.5 nm for measuring “as seen by the scanner”. Images of about 20*20 mm² are recorded in < 5 seconds. A full pellicle characterization with < 60 images taken is accomplished in less than one hour. Recently, we have performed some studies on applying this technique to carbon nano tube pellicles and on measuring the reflectance of pellicles which will be reported. The latter is heavily demanding as reflectances in the range of 0.01 % were measured with sensitivities and reproducibilities in the range of 0.002 %.

Paper Details

Date Published: 14 March 2019
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Proc. SPIE 10957, Extreme Ultraviolet (EUV) Lithography X, 109570Y (14 March 2019); doi: 10.1117/12.2515341
Show Author Affiliations
Rainer Lebert, RI Research Instruments GmbH (Germany)
Christian Pampfer, RI Research Instruments GmbH (Germany)
Andreas Biermanns-Foeth, RI Research Instruments GmbH (Germany)
Thomas Missalla, RI Research Instruments GmbH (Germany)
Christoph Phiesel, RI Research Instruments GmbH (Germany)
Christian Piel, RI Research Instruments GmbH (Germany)


Published in SPIE Proceedings Vol. 10957:
Extreme Ultraviolet (EUV) Lithography X
Kenneth A. Goldberg, Editor(s)

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