Share Email Print
cover

Proceedings Paper • new

Influence of PDI and composition ratio for micro phase separation about PS-b-PMMA block copolymer
Author(s): Terumasa Kosaka; Ryota Matsuki; Yukio Kawaguchi; Ryosuke Ogaki
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We have successfully synthesized polystyrene(PS)-b-polymethylmethacrylate (PMMA) block copolymer that is precious with controlled molecular weight, PDI and composition ratio by living anionic polymerization method using large-scale apparatus. In addition, the influence of PDI, composition ratio and composition distribution for micro phase separation about PS-b-PMMA block copolymer is investigated. The results show that PDI is the major factor for defect, while composition ratio and composition distribution has influence for morphology. As PDI increase 1.06 to 1.13, also defects are increased a lot. As composition ratio of PS increase 51% to 60%, micro phase separation structure was changed from lamella to gyroid. Moreover, we surmised that these properties have a boundary of influence towards micro phase separation. Therefore, is necessary to control these properties by living anionic polymerization in order to use DSA materials in semiconductor process.

Paper Details

Date Published: 25 March 2019
PDF: 7 pages
Proc. SPIE 10960, Advances in Patterning Materials and Processes XXXVI, 109601I (25 March 2019); doi: 10.1117/12.2514961
Show Author Affiliations
Terumasa Kosaka, HORIBA STEC, Co., Ltd. (Japan)
Ryota Matsuki, HORIBA STEC, Co., Ltd. (Japan)
Yukio Kawaguchi, HORIBA STEC, Co., Ltd. (Japan)
Ryosuke Ogaki, HORIBA STEC, Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 10960:
Advances in Patterning Materials and Processes XXXVI
Roel Gronheid; Daniel P. Sanders, Editor(s)

© SPIE. Terms of Use
Back to Top