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Proceedings Paper

Laser micromachining of micro-structures on CVD diamond
Author(s): Han Liu; Bing Guo; Mingtao Wu; Chunyu Zhang; Jun Zhang; Amr Monier; Qingliang Zhao
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Paper Abstract

Compared with conventional grinding tools, the chemical vapor deposition (CVD) diamond grinding tools have lots of advantages. However, the practical application of CVD grinding tools is limited, because of the small chip-holding space of abrasive layer. Based on the previous research, the structured grinding tools identified as an available method to improve grinding performance. Therefore, the micro-structured CVD diamond tools were invented. In this paper, the picosecond pulse laser was adopted to machine the micro-structures on CVD diamond. The ablation threshold of CVD diamond film was obtained with picosecond pulse laser. And then, the micro-grooves were machined on diamond film surface with different laser machining parameters. The effects of defocus, laser power, scanning speed, scanning times and machining offset on groove width and depth were analyzed respectively.

Paper Details

Date Published: 16 January 2019
PDF: 6 pages
Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 108381T (16 January 2019); doi: 10.1117/12.2514696
Show Author Affiliations
Han Liu, Harbin Institute of Technology (China)
Bing Guo, Harbin Institute of Technology (China)
Mingtao Wu, Harbin Institute of Technology (China)
Chunyu Zhang, Harbin Institute of Technology (China)
Jun Zhang, Harbin Institute of Technology (China)
Amr Monier, Harbin Institute of Technology (China)
Qingliang Zhao, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 10838:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Xiong Li; William T. Plummer; Bin Fan; Mingbo Pu; Yongjian Wan; Xiangang Luo, Editor(s)

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