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MEMS-in-the-lens 3D beam scanner for in vivo microscopy
Author(s): David L. Dickensheets; Tianbo Liu; Milind Rajadhyaksha
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Paper Abstract

The “MEMS-in-the-lens” active lens for a laser scanning microscope comprises a high numerical aperture front element, a 3D+ MOEMS beam scanner and a collimating back lens. The scanner utilizes a silicon gimbal with SU-8 polymer flexures and deformable membrane mirror. The mirror aperture is 4 mm in diameter, and is capable of 9 μm deflection for focus control, with four annular electrodes to allow tuning of primary and secondary spherical aberration. The gimbal supports tip/tilt actuation up to ±3° for lateral beam scanning. We show confocal imaging using a benchtop mockup of the active lens, illustrating the potential for this approach to support 3D microscopy for optical biopsy applications.

Paper Details

Date Published: 4 March 2019
PDF: 8 pages
Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093110 (4 March 2019); doi: 10.1117/12.2514579
Show Author Affiliations
David L. Dickensheets, Montana State Univ. (United States)
Tianbo Liu, Montana State Univ. (United States)
Milind Rajadhyaksha, Memorial Sloan-Kettering Cancer Ctr. (United States)


Published in SPIE Proceedings Vol. 10931:
MOEMS and Miniaturized Systems XVIII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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