Share Email Print

Proceedings Paper • new

Remote plasma chemical vapour deposition of group III-nitride tunnel junctions for LED applications
Author(s): S. Barik; D. Liu; J. D. Brown; M. Wintrebert-Fouquet; A. J. Fernandes; P. P. -T. Chen; Q. Gao; V. Chan; I. Mann
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The low growth temperature technology Remote Plasma Chemical Vapour Deposition (RPCVD) is currently being developed by BluGlass Ltd. for use in high-brightness LED applications. The unique growth conditions of RPCVD are demonstrated to produce Activated As-Grown (AAG) buried p-GaN for achieving GaN-based tunnel junctions (TJ) for use in current spreading and potential use in cascade LED and LD applications. Hybrid RPCVD/MOCVD TJs were grown on commercial full blue LEDs, and all-RPCVD TJs were grown on commercial partially completed blue LEDs and the devices were processed into 1.1 mm x 1.1mm chips. The LEDs with hybrid TJ displayed a 4.4% increase in light output power (LOP) and an increase in forward voltage (Vf) of 0.68 V compared to LEDs using indium-tin oxide (ITO) at a current density of 26 A/cm2 . The LEDs with all-RPCVD TJs displayed a 3.6% increase in LOP and an increase in Vf of 0.88 V at 26 A/cm2 .

Paper Details

Date Published: 1 March 2019
PDF: 8 pages
Proc. SPIE 10940, Light-Emitting Devices, Materials, and Applications, 1094018 (1 March 2019); doi: 10.1117/12.2513261
Show Author Affiliations
S. Barik, BluGlass, Ltd. (Australia)
D. Liu, BluGlass, Ltd. (Australia)
J. D. Brown, BluGlass, Ltd. (Australia)
M. Wintrebert-Fouquet, BluGlass, Ltd. (Australia)
A. J. Fernandes, BluGlass, Ltd. (Australia)
P. P. -T. Chen, BluGlass, Ltd. (Australia)
Q. Gao, BluGlass, Ltd. (Australia)
V. Chan, BluGlass, Ltd. (Australia)
I. Mann, BluGlass, Ltd. (Australia)

Published in SPIE Proceedings Vol. 10940:
Light-Emitting Devices, Materials, and Applications
Jong Kyu Kim; Michael R. Krames; Martin Strassburg, Editor(s)

© SPIE. Terms of Use
Back to Top