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Design and simulation of a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism
Author(s): Chengliang Pan; Ting Zhang; Tianliang Dai; Liling Han; Haojie Xia; Liandong Yu
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Paper Abstract

With rapid developments of micro/nano science and technology, precision platforms are widely required in the research and industry fields. This paper presents a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism. With symmetrical flexible structure and specific piezoelectric driving manner, effective and decoupled actuation of the stator is achieved. FEA simulations are conducted to investigate the characteristics of the stator. With established dynamic model of the platform, motion responses of stator and slider in the two directions are simulated and analyzed. With simultaneous actuation of the 2-DOF motions, a motion interaction phenomenon is raised and discussed.

Paper Details

Date Published: 7 March 2019
PDF: 8 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110534B (7 March 2019); doi: 10.1117/12.2512795
Show Author Affiliations
Chengliang Pan, Hefei Univ. of Technology (China)
Ting Zhang, Hefei Univ. of Technology (China)
Tianliang Dai, Hefei Univ. of Technology (China)
Liling Han, Hefei Univ. of Technology (China)
Haojie Xia, Hefei Univ. of Technology (China)
Liandong Yu, Hefei Univ. of Technology (China)


Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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