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Proceedings Paper

Fabrication of optomechanical structures suitable for microwave phase conjugation
Author(s): Boris Tsap; Kristofer S. J. Pister; Harold R. Fetterman
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Paper Abstract

The fabrication and testing of optomechanical structure which can be used for microwave phase conjugation is described. It consists of the metal-coated dielectric elongated beams 1 mm X 100 micrometers X 10 micrometers suspended by nonconductive torsional springs attached to a microwave transparent frame. Standard photolithography techniques combined with dry XeF2 etching yield hundred of rotating elements on a single 4' silicon wafer. Rotation of single elements, in a polarized electromagnetic field at 15 GHz, was measured and found to be in a good agreement with theory. This first experimental implementation of combining the concept of nonlinear microwave devices and microelectromechanical systems demonstrates the potential of an entirely new class of devices.

Paper Details

Date Published: 23 September 1996
PDF: 7 pages
Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); doi: 10.1117/12.251260
Show Author Affiliations
Boris Tsap, Univ. of California/Los Angeles (United States)
Kristofer S. J. Pister, Univ. of California/Los Angeles (United States)
Harold R. Fetterman, Univ. of California/Los Angeles (United States)


Published in SPIE Proceedings Vol. 2881:
Microelectronic Structures and MEMS for Optical Processing II
M. Edward Motamedi; Wayne Bailey, Editor(s)

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