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Proceedings Paper

Micromirrors with single crystal silicon support structures
Author(s): Zhimin Yao; Stephen W. Tang; Noel C. MacDonald
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Paper Abstract

A novel process for fabrication of torsional micro-mirrors with large dimensions (300 X 240 micrometers and 150 X 120 micrometers ) is presented. The mirrors consist of a sputtered aluminum film on a layer of supporting oxide mounted on fully suspended single crystal silicon grids. The grids have an aspect ratio of 7:1 in order to provide a stiff backbone and to ensure flatness of the mirror surface. The mirrors thus do not bend due to the internal stresses. A new idea of actuation of torsional structures is also presented in this paper. Vertical near-comb type actuators were fabricated to drive the torsional structures.

Paper Details

Date Published: 23 September 1996
PDF: 10 pages
Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); doi: 10.1117/12.251256
Show Author Affiliations
Zhimin Yao, Cornell Univ. (United States)
Stephen W. Tang, Cornell Univ. (United States)
Noel C. MacDonald, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 2881:
Microelectronic Structures and MEMS for Optical Processing II
M. Edward Motamedi; Wayne Bailey, Editor(s)

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