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Proceedings Paper

Statistical performance evaluation of electrostatic micro actuators for a deformable mirror
Author(s): Raji Krishnamoorthy; Thomas G. Bifano; Guido V.H. Sandri
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Paper Abstract

This paper describes a study to characterize the performance of surface micromachined electrostatic actuators, with a brief introduction to some MEMS (microelectromechanical systems) mirrors developed at BU incorporating these actuators. Fixed-fixed actuators were extensively tested to determine suitability for optical applications, and specifically for an adaptive optics imagining system. The critical issues relating to device performance, namely yield (indicating robustness and process reliability), position repeatability, precision and frequency response, were quantified in the research effort described here. The study demonstrated 95% device yield, 10 nm position repeatability (99% confidence levels), and greater than 66 kHz frequency bandwidth.

Paper Details

Date Published: 23 September 1996
PDF: 10 pages
Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); doi: 10.1117/12.251251
Show Author Affiliations
Raji Krishnamoorthy, Boston Univ. (United States)
Thomas G. Bifano, Boston Univ. (United States)
Guido V.H. Sandri, Boston Univ. (United States)


Published in SPIE Proceedings Vol. 2881:
Microelectronic Structures and MEMS for Optical Processing II
M. Edward Motamedi; Wayne Bailey, Editor(s)

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