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Proceedings Paper

Fabrication and characterization of a Fabry-Perot-based chemical sensor
Author(s): Jaeheon Han; Dean P. Neikirk; Marvin B. Clevenger; John Thomas McDevitt
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Paper Abstract

A micromachined silicon Fabry-Perot interferometric sensor is demonstrated as an optical chemical sensor. This sensor is based on the combined nature of the amplifying and tuning characteristics of the Fabry-Perot microcavity structure and the doping effect of polymer films such as Poly(3- dodecylthiophene) (P3DDT) upon exposure to an oxidizer, in this case, iodine. The fabricated Fabry-Perot chemical sensors show reversible sensing behavior with a maximum change in transmitted optical intensity of 60%. Significant improvement of the sensing performance is obtained from the Fabry-Perot microcavity structure compared to a simple planar single membrane structure, which indicates the resonant effect of the Fabry-Perot cavity on the chemical sensor. The measured sensing characteristics suggest that the change in absorptance of P3DDT polymer inside the microcavity plays a major role, while the deflection of a microcavity membrane by the P3DDT polymer-induced surface tension gives tunability of the sensor to maximize the amplification of output response by adjusting the Fabry- Perot microcavity gap spacing.

Paper Details

Date Published: 23 September 1996
PDF: 8 pages
Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); doi: 10.1117/12.251246
Show Author Affiliations
Jaeheon Han, Univ. of Texas/Austin (United States)
Dean P. Neikirk, Univ. of Texas/Austin (United States)
Marvin B. Clevenger, Univ. of Texas/Austin (United States)
John Thomas McDevitt, Univ. of Texas/Austin (United States)

Published in SPIE Proceedings Vol. 2881:
Microelectronic Structures and MEMS for Optical Processing II
M. Edward Motamedi; Wayne Bailey, Editor(s)

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