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Experimental study on non-linear calibration of two-dimensional nano-positioning stage
Author(s): Zhou Qi; Qi Li; Yu-shu Shi; Shi Li; Lu Huang; Sitian Gao
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Paper Abstract

This paper presents the control and non-linear calibration of large-scale two-dimensional nanometer displacement stage. The stage consists of a monolithic compliant mechanism, which using flexible hinge superimposed branch as a transmission part, driven by three piezoelectric actuators, To certify excellent performance of the stage, a micro-displacement measurement system which based on the measurement principle of a laser interferometer was setted up, then comparison of several stage parameters accomplished between before and after calibration. Based on the measurement of optical path and composition of dual-frequency laser interferometer, a experimental study on nano-positiong stage was carried out. The non-linear calibration method which based on newton-steffensen accelerated iteration are described; The accuracy of the calibration method was verified through experiments. Experiments show that: before calibration, the maximum nonlinearity error of x-axis and y-axis were 4.012μm and 2.875μm. after calibration, the maximum non-linearity of the x-axis is 8 nm and the maximum nonlinearity error of the y-axis is 10 nm, Meanwhile, a mathematical model is established to calculate the coupled displacement and yaw angle, The actual coupled displacement and yaw angle of X/Y were limited to 380nm and 1.4μrad.

Paper Details

Date Published: 7 March 2019
PDF: 8 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105341 (7 March 2019); doi: 10.1117/12.2512394
Show Author Affiliations
Zhou Qi, National Institute of Metrology (China)
Zhejiang Sci-tech Univ. (China)
Qi Li, National Institute of Metrology (China)
Yu-shu Shi, National Institute of Metrology (China)
Shi Li, National Institute of Metrology (China)
Lu Huang, National Institute of Metrology (China)
Sitian Gao, National Institute of Metrology (China)

Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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