Share Email Print
cover

Proceedings Paper • new

TFT with ultra-low temperature poly-silicon technology for flexible liquid crystal display
Author(s): Xuexin Lan; Yanmei Li; Lihua Zheng; Guozhao Chen; Junyi Li; Xuhui Peng
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Low temperature poly silicon technology with a temperature of 400℃ was developed and discussed for the application of flexible liquid crystal display (LCD). By optimizing the doping and activation processes, the TFT device with a mobility of 80 cm2/V•s was fabricated successfully. Also we studied the mechanism of doping and activation at 400℃, and found out that the upper limit of implanted dosage and electrical activation rate were 2 × 1014 ions/cm2 and 20%, respectively.

Paper Details

Date Published: 8 February 2019
PDF: 7 pages
Proc. SPIE 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging, 108431R (8 February 2019); doi: 10.1117/12.2512314
Show Author Affiliations
Xuexin Lan, Xiamen Tianma Microelectronics Co., Ltd. (China)
Yanmei Li, Xiamen Tianma Microelectronics Co., Ltd. (China)
Lihua Zheng, Xiamen Tianma Microelectronics Co., Ltd. (China)
Guozhao Chen, Xiamen Tianma Microelectronics Co., Ltd. (China)
Junyi Li, Xiamen Tianma Microelectronics Co., Ltd. (China)
Xuhui Peng, Xiamen Tianma Microelectronics Co., Ltd. (China)


Published in SPIE Proceedings Vol. 10843:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging
Yadong Jiang; Xiaoliang Ma; Xiong Li; Mingbo Pu; Xue Feng; Bernard Kippelen, Editor(s)

© SPIE. Terms of Use
Back to Top