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Design and testing of a compact optical prism module for multi-degree-of freedom grating interferometry application
Author(s): Xinghui Li; Xiang Xiao; Haiou Lu; Kai Ni; Qian Zhou; Xiaohao Wang
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Paper Abstract

In this research, a key optical component for multi-degree-of-freedom (MDOF) surface encoder was designed, fabricated and evaluated. In a MDOF grating interferometry system, there are four diffraction beams from the scale grating and reference grating. For further modulation, these beams will propagate more than 100 mm, which makes paralleling these beams necessary. In previous researches, separate prisms and a home fabricated diffraction device by combining four separate one-axis line gratings in a glass substrate have been demonstrated. However, large power loss and assembly complicity makes this technique less competitive. For solving this problem, this research proposed a new lens module, which is an improved type prism, quadrangular frustum pyramid. The prism is designed in such a way that these four reflected beams from the grating are symmetrically incident into the prism through the upper surface, total reflected on the inner sides of the prism, and then paralleling propagate through the bottom surface. A prism that allows an incident beam diameter of 1 mm and four paralleling beams with a 10 mm distance between the two diffraction beams along one direction was designed, fabricated and tested. Testing results based on an entire grating interferometry system verified that the proposal in this research is greatly effective in beam paralleling in terms of less power loss and high paralleling and greatly reduce the assembly complicity, which will eventually be beneficial for grating interferometry application.

Paper Details

Date Published: 7 March 2019
PDF: 6 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110533W (7 March 2019); doi: 10.1117/12.2512228
Show Author Affiliations
Xinghui Li, Graduate School at Shenzhen, Tsinghua Univ. (China)
Xiang Xiao, Graduate School at Shenzhen, Tsinghua Univ. (China)
Haiou Lu, Graduate School at Shenzhen, Tsinghua Univ. (China)
Kai Ni, Graduate School at Shenzhen, Tsinghua Univ. (China)
Qian Zhou, Graduate School at Shenzhen, Tsinghua Univ. (China)
Xiaohao Wang, Graduate School at Shenzhen, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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