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Design and testing of a chromatic dispersion system for displacement application by using a spatial-bandpass-filter
Author(s): Jiao Bai; Xiaohao Wang; Xinghui Li; Qian Zhou; Kai Ni
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Paper Abstract

Chromatic confocal displacement measurement is a newly developed technology for linear precision positioning with a sub-micron meter accuracy over a millimeter order range. In this technique, the chromatic spectrum of a white light source is divided by an optical dispersion system. The encoded spectrum disperses along the axial direction, with which the axial position can be detected by a spectrometer at a high precision. Thus, the optical dispersion system that determines the final measurement precision is required to own a large dispersion capacity and a small spherical aberration. A chromatic dispersion lens (CDL) module and a spatial-bandpass-filter (SBF) were proposed in this research to improve the dispersion performance. Based on the geometrical imaging principle, the CDL and SBF parameters were preliminarily designed and further tested by the optical design software ZEMAX. The testing results verified that with SBF and CDL, the spherical aberration was largely reduced and the imaging quality was greatly modified. The focus beam spot of the central wavelength 550 nm can be as small as 10μm. Under such a condition, the measurement error is no larger than ±0.7μm over a 1700μm measurement range.

Paper Details

Date Published: 7 March 2019
PDF: 7 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110533I (7 March 2019); doi: 10.1117/12.2512172
Show Author Affiliations
Jiao Bai, Graduate School at Shenzhen, Tsinghua Univ. (China)
Institute of Materials (China)
Xiaohao Wang, Graduate School at Shenzhen, Tsinghua Univ. (China)
Xinghui Li, Graduate School at Shenzhen, Tsinghua Univ. (China)
Qian Zhou, Graduate School at Shenzhen, Tsinghua Univ. (China)
Kai Ni, Graduate School at Shenzhen, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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