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Proceedings Paper

Fabrication and performance of MARS optical modulators for fiber-to-the-home systems
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Paper Abstract

The methods used to fabricate silicon optical modulators (MARS) devices in several material systems are described. Experimental results showing low bit-error-rate performance at 3.5 Mbit/sec. with a broad optical spectrum are presented.

Paper Details

Date Published: 23 September 1996
PDF: 6 pages
Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); doi: 10.1117/12.251217
Show Author Affiliations
James A. Walker, Lucent Technologies (United States)
Keith W. Goossen, Lucent Technologies (United States)

Published in SPIE Proceedings Vol. 2879:
Micromachining and Microfabrication Process Technology II
Stella W. Pang; Shih-Chia Chang, Editor(s)

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