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Non-destructive rapid inspection methods for spatial light modulator using swept source optical coherence tomography
Author(s): Pingping Jia; Hong Zhao; Yuwei Qin; Meiqi Fang; Xiaopeng Guo
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Paper Abstract

A high speed swept source optical coherence tomography (SS-OCT) system has been proposed for tomographic map of spatial light modulator. In the optical arrangement, a swept-source with 100 kHz axial-scanning rate and a compact Michelson interferometer was applied. The implemented SS-OCT system has an axial resolution of 15μm and penetration depth of 12mm. The two-dimensional tomographic grayscale maps of the sample can be obtained in real time. As a result, the thickness of glass substrate, liquid crystal layer and the silicon substrate could be obtained simultaneously. Compared with the traditional detection methods, The SS-OCT system has the characteristics of fast imaging speed, stable repeatability of measurement with high-resolution and non-destructive.

Paper Details

Date Published: 7 March 2019
PDF: 6 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105337 (7 March 2019); doi: 10.1117/12.2512097
Show Author Affiliations
Pingping Jia, Xi'an Jiaotong Univ. (China)
Weinan Normal Univ. (China)
Hong Zhao, Xi'an Jiaotong Univ. (China)
Yuwei Qin, Weinan Normal Univ. (China)
Meiqi Fang, Xi'an Jiaotong Univ. (China)
Xiaopeng Guo, Xi'an Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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