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Comparison and analysis on the accurate measurement of spherical curvature radius
Author(s): Yi Shen; Peng Wang; Hao Zhang; Changshun Hui; Kun Yang
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Paper Abstract

A fundamental issue in spherical optical manufacturing process is how to measure the radius of curvature accurately. Due to the high precision requirement for some advanced optics applications, the accuracy of the measurement is usually crucial. In this paper, kinds of spherical curvature radius methods that use spherometer, laser interferometer and profilometer are introduced, the error sources of these methods are analyzed. A series of measurement experiences with radius rang from R 7.65mm to R790.5mm are carried out and the results are analyzed according to measurement error theory. Consequently the advantages of the three kinds of instruments in radius measurement are obtained.

Paper Details

Date Published: 18 January 2019
PDF: 6 pages
Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391V (18 January 2019); doi: 10.1117/12.2511470
Show Author Affiliations
Yi Shen, Tianjin Jinhang Institute of Technical Physics (China)
Peng Wang, Tianjin Jinhang Institute of Technical Physics (China)
Hao Zhang, Tianjin Jinhang Institute of Technical Physics (China)
Changshun Hui, Tianjin Jinhang Institute of Technical Physics (China)
Kun Yang, Tianjin Jinhang Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 10839:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Fan Wu; Yudong Zhang; Xiaoliang Ma; Xiong Li; Bin Fan, Editor(s)

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