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Two-dimensional reflective optical encoder based on point source illuminated grating imaging
Author(s): Hang Chen; Jian Wang; Yue Gao; Cheng-Chih Hsu; Peng Jin; Jie Lin
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Paper Abstract

A novel two-dimensional reflective grating encoder is introduced. The optical encoder is developed by a binary amplitude reflective scale grating and a two-dimensional slit displacement sensor, which is fabricated by MEMS technology. Based on Talbot effort, the proposed method can achieve millimetric measurement with high accuracy, where the displacement difference within 0.1% and 0.2% for 1 mm and 20 mm measurement, respectively. By using the eight-segment data division program, the proposed method can easily distinguish 1 μm displacement measurement. Furthermore, in measurement speed tests, the proposed method can reach the movement speed about 5000 μm/s. The experimental results showed the proposed method can achieve high resolution, high speed and long-range measurement, which is potential in the industries and workshops application.

Paper Details

Date Published: 7 March 2019
PDF: 8 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105313 (7 March 2019); doi: 10.1117/12.2511441
Show Author Affiliations
Hang Chen, Harbin Institute of Technology (China)
Jian Wang, Harbin Institute of Technology (China)
Yue Gao, Beijing Aerospace Institute for Metrology & Measurement Technology (China)
Cheng-Chih Hsu, Yuan Ze Univ. (Taiwan)
Peng Jin, Harbin Institute of Technology (China)
Jie Lin, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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