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Monolithic high-contrast gratings as highly reflective mirrors: optimization and fabrication
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Paper Abstract

High contrast gratings (HCGs) are an attractive alternative to distributed Bragg reflectors (DBRs) as highly reflective mirrors for VCSELs. In our previous work we proposed the use of monolithic HCGs (MHCGs) to reduce the vertical thickness and simplify the epitaxial structure of VCSELs. In this work we discuss the optimization and fabrication of MHCGs. We also analyze the impact of processing imperfections on the power reflectance of MHCGs.

Paper Details

Date Published: 8 March 2019
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Proc. SPIE 10928, High Contrast Metastructures VIII, 1092819 (8 March 2019); doi: 10.1117/12.2511043
Show Author Affiliations
Magdalena Marciniak, Technical Univ. of Berlin (Germany)
Lodz Univ. of Technology (Poland)
Marcin Gębski, Technical Univ. of Berlin (Germany)
Lodz Univ. of Technology (Poland)
James A. Lott, Technical Univ. of Berlin (Germany)
Tomasz G. Czyszanowski, Lodz Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10928:
High Contrast Metastructures VIII
Connie J. Chang-Hasnain; Andrei Faraon; Weimin Zhou, Editor(s)

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