Share Email Print
cover

Proceedings Paper • new

Ultrafast lasers for advanced manufacturing of flat panel displays
Author(s): Terence Hollister; Jim Bovatsek
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

High volume manufacturing of flat panel displays presents many challenges to realize precision features over large panel sizes with high yield and high throughput. Laser technology continues to be a key enabler in many respects. In particular, for cutting display glass plates, ultrafast lasers with pulse durations in the picosecond and femtosecond regime offer unique advantages. Processing display cover glass, which is highly transparent to both visible and UV wavelengths, can benefit from ultrashort laser pulses which deposit a high amount of energy in very short time scales. This allows for fine structuring of the glass with minimal chipping, cracking, and melting. In this work, we present display glass cutting results using state-of-the art, novel picosecond pulse laser technology. High quality and high throughput results are demonstrated, with precise glass cutting achieved with low sidewall roughness at speeds in the 1 m/s regime.

Paper Details

Date Published: 4 March 2019
PDF: 7 pages
Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 109050I (4 March 2019); doi: 10.1117/12.2510941
Show Author Affiliations
Terence Hollister, Spectra-Physics, a division of MKS Instruments (United States)
Jim Bovatsek, Spectra-Physics, a division of MKS Instruments (United States)


Published in SPIE Proceedings Vol. 10905:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
Tetsuya Makimura; Gediminas Račiukaitis; Carlos Molpeceres, Editor(s)

© SPIE. Terms of Use
Back to Top